JPH0583200B2 - - Google Patents

Info

Publication number
JPH0583200B2
JPH0583200B2 JP63137507A JP13750788A JPH0583200B2 JP H0583200 B2 JPH0583200 B2 JP H0583200B2 JP 63137507 A JP63137507 A JP 63137507A JP 13750788 A JP13750788 A JP 13750788A JP H0583200 B2 JPH0583200 B2 JP H0583200B2
Authority
JP
Japan
Prior art keywords
electrode
discharge
auxiliary electrode
dielectric
power supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63137507A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01307284A (ja
Inventor
Takeo Haruta
Mitsuo Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP13750788A priority Critical patent/JPH01307284A/ja
Publication of JPH01307284A publication Critical patent/JPH01307284A/ja
Publication of JPH0583200B2 publication Critical patent/JPH0583200B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP13750788A 1988-06-06 1988-06-06 放電電極 Granted JPH01307284A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13750788A JPH01307284A (ja) 1988-06-06 1988-06-06 放電電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13750788A JPH01307284A (ja) 1988-06-06 1988-06-06 放電電極

Publications (2)

Publication Number Publication Date
JPH01307284A JPH01307284A (ja) 1989-12-12
JPH0583200B2 true JPH0583200B2 (en]) 1993-11-25

Family

ID=15200284

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13750788A Granted JPH01307284A (ja) 1988-06-06 1988-06-06 放電電極

Country Status (1)

Country Link
JP (1) JPH01307284A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR920702048A (ko) * 1990-03-05 1992-08-12 다께바야시 쇼오고 방전여기 엑시머 레이저장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5810872A (ja) * 1981-07-14 1983-01-21 Toshiba Corp 太陽電池の製造方法
JPS6191983A (ja) * 1984-10-11 1986-05-10 Mitsubishi Electric Corp 放電励起短パルスレ−ザ装置
JPS6231186A (ja) * 1985-08-02 1987-02-10 Mitsubishi Electric Corp パルスレ−ザ発振器

Also Published As

Publication number Publication date
JPH01307284A (ja) 1989-12-12

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term